Optical Metrology Systems
The actual performance of an optical system is not determined by manufacturing tolerances alone. What matters is the optical quality under real operating conditions. Precise measurement and evaluation of the wavefront is therefore essential for reliably capturing optical errors, aberrations, and actual system performance.
TOPAG offers high-performance optical metrology systems for the precise, contact-free characterization of optical components and complete optical systems. The solutions are based on modern Shack-Hartmann wavefront sensor technology and enable reliable analysis of optical properties.
With the MESO, R-FLEX, and OEC metrology systems from Imagine Optic, versatile solutions are available for a wide range of requirements in optical metrology and wavefront measurement, from the characterization of individual optical components to the analysis of complex optical systems.
Among other things, the systems enable the measurement of transmitted and reflected wavefront error (TWE/RWE), surface form and flatness, radius of curvature, wavefront errors, and aberrations, as well as MTF and PSF. This makes them suitable for demanding applications in research, development, production, and quality control.
Key Features of Our Metrology Systems
Reliable characterization of optical components and systems with high resolution and measurement accuracy.
Solutions for a wide range of applications, from plane-parallel optics and large apertures to the characterization of complex optical systems.
Contact-free, vibration-insensitive measurement technology for precise measurements, even under demanding environmental conditions.
R-FLEX and OEC can be adapted and expanded with different wavefront sensors, light sources, and optical modules to suit individual measurement tasks.
MESO – Characteristics and Design
Interference-Free Wavefront Measurement for Plane-Parallel Optics
With MESO, TOPAG offers a turnkey optical metrology system for the precise, contact-free characterization of plane-parallel optical components. Shack-Hartmann wavefront measurement enables a single camera acquisition with capture times as short as 27 µs, providing a vibration-insensitive alternative to Fizeau phase-shifting interferometers, which require a reference surface to be mechanically moved in order to compute a phase image. As a result, MESO requires no reference arm and no additional vibration isolation, making it suitable for measurements directly in the production environment.
Precise Measurements with POP and LIFT Technology
The patented Parallel Optics Procedure (POP) combines reflection and transmission measurements in a single measurement. This enables comprehensive characterization of plane-parallel optics, including the determination of Transmitted Wavefront Error (TWE), surface form, flatness, and wedge. At-Wavelength Metrology enables measurements at up to four automatically controllable wavelengths, allowing for a realistic characterization of optical components at their actual operating wavelength.
For particularly detailed wavefront analysis, LIFT technology (Linearized Focal Plane Technique) provides up to 16 times higher spatial resolution than conventional Shack-Hartmann sensors and achieves a phase-point resolution of up to 680 × 504 points. This enables the precise detection and characterization of even the finest wavefront structures and aberrations.
Technical Specifications of the MESO Metrology System
MESO VIS
- Calibrated spectral range: 405–830 nm
- Test beam diameter: 38.1–152 mm, optically zoomable
- Phase point resolution: 680 × 500
- Minimum exposure time: 27 ms
- Measurement configuration: Double-pass
- Mounting configuration: Horizontal or vertical
- RMS wavefront repeatability: 1 nm
MESO SWIR
- Calibrated spectral range: 1050–1700 nm
- Test beam diameter: 38.1–152 mm, optical zoom
- Phase point resolution: 160 × 128
- Minimum exposure time: 37 ms
- Measurement configuration: Double-pass
- Mounting configuration: Horizontal or vertical
- RMS wavefront repeatability: 1 nm
MESO – White Papers
At-Wavelength Metrology for optical systems and surfaces
Parallel Optics Testing: simultaneous characterization of both optical faces in laboratory and manufacturing conditions
Shop Floor Measurement: vibration-proofed solutions for optical metrology
MESO – Application Notes
Dichroic Mirror characterization with MESO™
Optical Metrology of multiple flat surfaces using Shack-Hartmann technology
One Software Platform for All MESO Models
With WAVESURF software, measurements across all MESO models can be performed easily, automatically, and reproducibly. Pre-scripted test procedures guide the operator step by step through the entire measurement process – from setup to analysis. The software automatically manages the measurement parameters and generates a comprehensive test report based on the measurement results.
WAVESURF enables efficient and reliable measurement data acquisition in production environments while reducing the need for extensive operator training. Measurement results are ISO 10110 compliant and can be exported in various data formats, allowing seamless integration into existing inspection, documentation, and quality assurance processes.
R-FLEX – Characteristics and Design
Modular Platform for Optical Components and Systems
With R-FLEX, TOPAG offers a modular optical metrology platform for the precise characterization and alignment of optical components and complex optical systems. The system combines a wavefront sensor, collimator, focusing module, and light source in a flexible setup and can be adapted to specific measurement tasks using different wavefront sensors, focusing and collimation modules. Thanks to its patented simultaneous measurement of phase and intensity, R-FLEX delivers reliable measurement results even in the presence of vibrations and atmospheric turbulence.
Versatile Measurement Capabilities for a Wide Range of Optics
Depending on the configuration, R-FLEX enables single-pass and double-pass measurements, the analysis of wavefront errors and aberrations, as well as MTF and PSF measurements. Interchangeable focusing and collimation modules allow the system to be adapted to different f-numbers, wavelengths, and beam diameters.
Typical test objects include lenses and objectives, filters, dichroic beam splitters, optical windows, mirrors, beam expanders, and head-up displays (HUDs). R-FLEX is also suitable for microscopy and imaging systems, telescopes, and complex optical assemblies and systems.
How Are the R-FLEX Modules Configured?
The R-FLEX configuration is tailored to the specific measurement task, wavelength range, and optical characteristics of the test object.
Step 1: Select the wavefront sensor
Depending on the wavelength range and measurement requirements, various HASO and LIFT wavefront sensors are available.
Step 2: Define the optical setup
The light source, collimator, and focusing module are selected according to the aperture, beam diameter, and F/# of the test object.
Step 3: Determine the appropriate system configuration
Based on the selected components, the appropriate solution is configured for VIS/NIR, SWIR, or large-aperture applications.
We support you throughout the selection and configuration of the appropriate sensors and modules and tailor the R-FLEX system to your specific measurement requirements. If required, we can also conduct a demonstration measurement with your own test objects on site, allowing you to evaluate the solution under real-world conditions.
Technical Specifications of the R-FLEX
R-FLEX VIS/NIR
- Spectral range: 400–1100 nm
- Wavefront sensors: HASO / LIFT
- Measurement configuration: Single-pass / Double-pass
- Measurement accuracy: up to λ/200 RMS in double-pass
- Output beam: Collimated or divergent
- F-number (F/#): Configuration-dependent
R-FLEX SWIR
- Spectral range: 1000–1700 nm
- Wavefront sensors: HASO SWIR / LIFT SWIR
- Measurement configuration: Single-pass / Double-pass
- Measurement accuracy: up to λ/200 RMS in double-pass
- Output beam: Collimated or divergent
- F-number (F/#): Configuration-dependent
R-FLEX Application Notes
Lens system inspection and optical characterization with HASO R-Flex
Eyewear and smart glass quality control with HASO Shack-Hartmann wavefront sensor
R-FLEX LA – Extension for Large Optics
R-FLEX LA is the large-aperture collimation platform that extends R-FLEX for the characterization of large optical components and surfaces. Depending on the configuration, collimated test beam diameters from 30 to 200 mm are available.
R-FLEX LA enables double-pass measurements of large optical components as well as single-pass measurements of large-diameter laser and collimated beams. The system also enables precise wavefront analysis in the presence of central obscuration or beam interruptions caused by secondary-mirror support structures, for example when characterizing and aligning large telescope mirrors.
Like R-FLEX, R-FLEX LA is insensitive to vibrations and atmospheric turbulence, making it suitable for demanding measurement tasks in a variety of environments.
Optical Engineer Companion (OEC) – Characteristics and Design
A Modular Platform Without a Fixed Lab Setup
With the Optical Engineer Companion (OEC) from Imagine Optic, TOPAG offers a modular platform for optical metrology, wavefront measurement, and the characterization of optical components and systems. More than 800 configurations can be assembled from various HASO and LIFT wavefront sensors, metrology light sources, R-FLEX systems, R-FLEX LA platforms, and focusing modules. Depending on the measurement task, the modules can be quickly exchanged between different setups without realignment – without requiring a dedicated optical table.
The proven Shack-Hartmann wavefront sensing technology provides accuracy of up to λ/100 RMS and is insensitive to vibrations. LIFT technology increases the spatial resolution by a factor of 16, achieving a resolution level comparable to conventional interferometry for the characterization of optical surfaces. Measurement results are directly visualized and analyzed in WAVEVIEW4, eliminating the need for separate post-processing.
OEC VIS/NIR and OEC SWIR for versatile measurement applications
The OEC is available for VIS/NIR and SWIR applications. The VIS/NIR configuration combines HASO and LIFT wavefront sensors with R-FLEX, R-FLEX LA, metrology light sources, and focusing modules. For SWIR applications, corresponding SWIR wavefront sensors, R-FLEX SWIR, and R-FLEX LA SWIR are available.
The modular platform enables the characterization, testing, and alignment of a wide range of optical components and systems, including lenses and objectives, laser optics, filters, optical windows, mirrors, dichroic beam splitters, beam expanders, afocal systems, head-up displays (HUDs), telescopes, and complex optical and imaging systems. Depending on the configuration, large optical components and systems can also be characterized and aligned.
How is an Optical Engineer Companion configured?
The configuration is tailored to the measurement task, wavelength range, and optical characteristics of the test object.
Step 1: Select the R-FLEX system
Depending on the application, the appropriate R-FLEX system for VIS/NIR or SWIR is selected. R-FLEX LA platforms are available for applications requiring large apertures.
Step 2: Select the wavefront sensor
Depending on the wavelength range, measurement task, and required resolution, the appropriate HASO or LIFT wavefront sensor is selected.
Step 3: Define the light source and focusing module
The appropriate metrology light source and focusing module are selected according to the required wavelength, aperture, beam size, and measurement geometry.
Step 4: Optimize the configuration
The selected components are combined into an OEC configuration optimized for the specific measurement task and test object.
We support you throughout the selection and configuration of the appropriate sensors and modules and tailor the OEC to your specific measurement requirements. On request, we can also conduct a demonstration measurement using your own test objects, allowing you to evaluate the appropriate configuration under real-world conditions.
Technical Specifications of the OEC
OEC VIS/NIR
- Wavefront sensors: HASO / LIFT
- R-FLEX: R-FLEX VIS, 400–1100 nm
- R-FLEX LA – Test beam diameter: 30–200 mm
- Configurations: 800+
- Software: WAVEVIEW4
OEC SWIR
- Wavefront sensors: HASO SWIR / LIFT SWIR 160
- R-FLEX: R-FLEX SWIR, 1000–1700 nm
- R-FLEX LA – Test beam diameter: 30–150 mm
- Configurations: 800+
- Software: WAVEVIEW4
Every Measurement Task Needs the Right Configuration.
Tell us about your requirements, and we’ll work together to find the right solution from MESO, R-FLEX, or OEC.
FAQ – Optical Metrology Systems
Which Optical Metrology System Is Right for My Application?
The right choice depends on the type of optic, wavelength, aperture, measurement task, and required level of automation. MESO is particularly well suited to flat and plane-parallel optics, R-FLEX to a wide range of measurement tasks on optical components and systems, R-FLEX LA to large optics, and the OEC to individually configurable measurement setups.
What Is the Difference Between MESO, R-FLEX, R-FLEX LA, and OEC?
MESO: A specialized solution for flat and plane-parallel optics, featuring the Parallel Optics Procedure (POP) and automated test procedures.
R-FLEX: A flexible platform for characterizing optical components and systems.
R-FLEX LA: An extension of R-FLEX for large optics and test diameters.
OEC: A modular system with more than 800 configurations of wavefront sensors, light sources, and metrology systems.
What Is the Parallel Optics Procedure (POP)?
The Parallel Optics Procedure (POP) is a patented measurement technique from Imagine Optic for plane-parallel optics. By taking measurements in reflection and transmission, the front and back surfaces can be characterized separately, and the Transmitted Wavefront Error (TWE) can be determined.
Which Parameters Can Be Determined With R-FLEX and OEC?
Depending on the system configuration and software, parameters such as wavefront error, optical aberrations, Zernike coefficients, MTF, PSF, focus, and beam tilt can be analyzed, among others.
Which Software Is Used for the Metrology Systems?
MESO uses WAVESURF for guided measurement procedures, automated testing, and reporting. R-FLEX and OEC use WAVEVIEW4 for wavefront visualization and analysis, as well as a range of other optical analysis functions.
Which Wavelengths and Test Diameters Are the Systems Available For?
The available wavelengths and measurement ranges depend on the specific system and configuration. R-FLEX VIS, for example, covers 400 to 1100 nm, while R-FLEX SWIR is designed for the short-wave infrared range from 1000 to 1700 nm. MESO measures in the range of 405 to 830 nm, with up to four automatically controllable wavelengths simultaneously. The Optical Engineer Companion can likewise be configured for VIS/NIR or SWIR by selecting the appropriate wavefront sensor and R-FLEX platform.